Fast Kelvin-probe Type Method for Measuring the Built-in voltage Inside Clodes Cavity MEMS-devices

Mika Koskenvuori, V-P Rytkönen, Pekka Rantakari, Ilkka Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationICMAT 2007, Singapore, 1-6 July 2007
    Pages122-125
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

    Keywords

    • built-in voltage
    • contact potential
    • Kelvin-probe
    • micromechanics
    • stability
    • vibrating capacitor

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