@article{6cb5b37814b54d5cbdcc78e89362cd26,
title = "Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses",
author = "Lauri Sainiemi and Kestas Grigoras and Ivan Kassamakov and Kalle Hanhij{\"a}rvi and Juha Aaltonen and Ji Fan and Ville Saarela and Edward Haeggstr{\"o}m and Sami Franssila",
year = "2009",
language = "English",
volume = "149",
pages = "305--314",
journal = "Sensors and Actuators A: Physical",
issn = "1873-3069",
publisher = "Elsevier",
number = "2",
}