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Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses

  • Lauri Sainiemi
  • , Kestas Grigoras
  • , Ivan Kassamakov
  • , Kalle Hanhijärvi
  • , Juha Aaltonen
  • , Ji Fan
  • , Ville Saarela
  • , Edward Haeggström
  • , Sami Franssila

    Research output: Contribution to journalArticleScientificpeer-review

    17 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)305-314
    JournalSensors and Actuators A: Physical
    Volume149
    Issue number2
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

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