Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses

Lauri Sainiemi, Kestas Grigoras, Ivan Kassamakov, Kalle Hanhijärvi, Juha Aaltonen, Ji Fan, Ville Saarela, Edward Haeggström, Sami Franssila

    Research output: Contribution to journalArticleScientificpeer-review

    16 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)305-314
    JournalSensors and Actuators A, Physical
    Volume149
    Issue number2
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

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