Fabrication of the Silicon Nanostructures by Reactive Ion Etching and Self-Organised Metal and Polymer Masks

A. Malinin, V. Ovchinnikov, C. Tuovinen, A. Hovinen, C. Xia

Research output: Working paperProfessional

Original languageEnglish
Publication statusPublished - 1999
MoE publication typeD4 Published development or research report or study

Publication series

NameLDSD '99 The Third International Conference on Low Dimensional Structures and Devices, Antalya, Turkey, 15-17 September 1999


  • Nanostructures
  • Polymer Masks
  • RIE
  • Silicon

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