Fabrication of the Silicon Nanostructures by Reactive Ion Etching and Self-Organised Metal and Polymer Masks

A. Malinin, V. Ovchinnikov, C. Tuovinen, A. Hovinen, C. Xia

Research output: Working paper › Professional

Original language	English
Publication status	Published - 1999
MoE publication type	D4 Published development or research report or study

Name	LDSD '99 The Third International Conference on Low Dimensional Structures and Devices, Antalya, Turkey, 15-17 September 1999

Keywords

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title = "Fabrication of the Silicon Nanostructures by Reactive Ion Etching and Self-Organised Metal and Polymer Masks",

keywords = "Nanostructures, Polymer Masks, RIE, Silicon, Nanostructures, Polymer Masks, RIE, Silicon, Nanostructures, Polymer Masks, RIE, Silicon",

author = "A. Malinin and V. Ovchinnikov and C. Tuovinen and A. Hovinen and C. Xia",

year = "1999",

language = "English",

series = "LDSD '99 The Third International Conference on Low Dimensional Structures and Devices, Antalya, Turkey, 15-17 September 1999",

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TY - UNPB

T1 - Fabrication of the Silicon Nanostructures by Reactive Ion Etching and Self-Organised Metal and Polymer Masks

AU - Malinin, A.

AU - Ovchinnikov, V.

AU - Tuovinen, C.

AU - Hovinen, A.

AU - Xia, C.

PY - 1999

Y1 - 1999

KW - Nanostructures

KW - Polymer Masks

KW - RIE

KW - Silicon

KW - Nanostructures

KW - Polymer Masks

KW - RIE

KW - Silicon

KW - Nanostructures

KW - Polymer Masks

KW - RIE

KW - Silicon

M3 - Working paper

T3 - LDSD '99 The Third International Conference on Low Dimensional Structures and Devices, Antalya, Turkey, 15-17 September 1999

BT - Fabrication of the Silicon Nanostructures by Reactive Ion Etching and Self-Organised Metal and Polymer Masks

ER -