Fabrication of the Nanostructures Based on Silicon Nanopillars by Reactive Ion Etching Using Self-Organised Metal and polymer Masks

V. Ovchinnikov, A. Malinin, S. Novikov

Research output: Working paperProfessional

Original languageEnglish
Publication statusPublished - 1999
MoE publication typeD4 Published development or research report or study

Publication series

NameE-MRS 1999 Spring Meeting, Strasbourgh, France, June 1999


  • Gold Mask
  • Nanopillars
  • RIE
  • Silicon

Cite this