Fabrication of SOI micro- and nanoelectromechanical devices by focused ion beam doping and deep reactive ion etching

Nikolai Chekurov, Lauri Sainiemi, Antti Peltonen, Ilkka Tittonen, Sami Franssila

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2009
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameMicro and Nanoengineering, Ghent, 2009

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