@inproceedings{a58e9933af8e4987ae8be6add0b8d062,
title = "Fabrication of silicon nanostructures for photonic crystal applications",
keywords = "anions, Er-doped fiber, Fabry-Perot filter, industrial processes, integrated optics, on-line capillary electrophoresis, optical amplifiers, optical communications, pulp waters, ring network, silicon on insulator, WDM, anions, Er-doped fiber, Fabry-Perot filter, industrial processes, integrated optics, on-line capillary electrophoresis, optical amplifiers, optical communications, pulp waters, ring network, silicon on insulator, WDM, anions, Er-doped fiber, Fabry-Perot filter, industrial processes, integrated optics, on-line capillary electrophoresis, optical amplifiers, optical communications, pulp waters, ring network, silicon on insulator, WDM",
author = "Sanna Yliniemi and Janne Simonen and Timo Aalto and P{\"a}ivi Heimala",
year = "2002",
language = "English",
pages = "105--108",
booktitle = "The 4th International Conference on Materials for Mikroelectronics and Nanoengineering (MFMN), Hanasaari, Finland, 10-12 June, 2002",
publisher = "IOM Communications Ltd.",
address = "United Kingdom",
}