Fabrication of silicon nanostructures for photonic crystal applications

Sanna Yliniemi, Janne Simonen, Timo Aalto, Päivi Heimala

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe 4th International Conference on Materials for Mikroelectronics and Nanoengineering (MFMN), Hanasaari, Finland, 10-12 June, 2002
    Place of PublicationLontoo
    PublisherIOM Communications Ltd.
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication


    • anions
    • Er-doped fiber
    • Fabry-Perot filter
    • industrial processes
    • integrated optics
    • on-line capillary electrophoresis
    • optical amplifiers
    • optical communications
    • pulp waters
    • ring network
    • silicon on insulator
    • WDM

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