Fabrication of Silicon Nanopillars Using Self-Organized Gold-Chromium Mask

V. Ovchinnikov, A. Malinin, S. Novikov, C. Tuovinen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	459
Journal	Materials Science and Engineering B
Volume	B69-70
Publication status	Published - 1999
MoE publication type	A1 Journal article-refereed

Cite this

@article{facd86dca57541c0805ee44d4c59b2c6,

title = "Fabrication of Silicon Nanopillars Using Self-Organized Gold-Chromium Mask",

keywords = "Gold-Chromium, Nanopillars, Silicon, Gold-Chromium, Nanopillars, Silicon, Gold-Chromium, Nanopillars, Silicon",

author = "V. Ovchinnikov and A. Malinin and S. Novikov and C. Tuovinen",

year = "1999",

language = "English",

volume = "B69-70",

pages = "459",

journal = "MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS",

issn = "1873-4944",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Fabrication of Silicon Nanopillars Using Self-Organized Gold-Chromium Mask

AU - Ovchinnikov, V.

AU - Malinin, A.

AU - Novikov, S.

AU - Tuovinen, C.

PY - 1999

Y1 - 1999

KW - Gold-Chromium

KW - Nanopillars

KW - Silicon

KW - Gold-Chromium

KW - Nanopillars

KW - Silicon

KW - Gold-Chromium

KW - Nanopillars

KW - Silicon

M3 - Article

VL - B69-70

SP - 459

JO - MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS

JF - MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS

SN - 1873-4944

ER -