Fabrication of Silicon Nanopillars Using Self-Organized Gold-Chromium Mask

V. Ovchinnikov, A. Malinin, S. Novikov, C. Tuovinen

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)459
JournalMaterials Science and Engineering B
VolumeB69-70
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed

Keywords

  • Gold-Chromium
  • Nanopillars
  • Silicon

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