Fabrication of porous membrane filter from p-type silicon

Research output: Contribution to journalArticleScientificpeer-review

Standard

Fabrication of porous membrane filter from p-type silicon. / Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.

In: Physica Status Solidi, Vol. 202, 2005, p. 1624-1628.

Research output: Contribution to journalArticleScientificpeer-review

Harvard

Grigoras, K, Franssila, S, Sikanen, T, Kotiaho, T & Kostiainen, R 2005, 'Fabrication of porous membrane filter from p-type silicon', Physica Status Solidi, vol. 202, pp. 1624-1628.

APA

Grigoras, K., Franssila, S., Sikanen, T., Kotiaho, T., & Kostiainen, R. (2005). Fabrication of porous membrane filter from p-type silicon. Physica Status Solidi, 202, 1624-1628.

Vancouver

Grigoras K, Franssila S, Sikanen T, Kotiaho T, Kostiainen R. Fabrication of porous membrane filter from p-type silicon. Physica Status Solidi. 2005;202:1624-1628.

Author

Grigoras, K. ; Franssila, S. ; Sikanen, T. ; Kotiaho, T. ; Kostiainen, R. / Fabrication of porous membrane filter from p-type silicon. In: Physica Status Solidi. 2005 ; Vol. 202. pp. 1624-1628.

Bibtex - Download

@article{306ae0ab4c7945868926b2b10a21addf,
title = "Fabrication of porous membrane filter from p-type silicon",
keywords = "fabrication of porous membrane filter, p-type silicon, fabrication of porous membrane filter, p-type silicon, fabrication of porous membrane filter, p-type silicon",
author = "K. Grigoras and S. Franssila and T. Sikanen and T. Kotiaho and R. Kostiainen",
year = "2005",
language = "English",
volume = "202",
pages = "1624--1628",
journal = "Physica Status Solidi",

}

RIS - Download

TY - JOUR

T1 - Fabrication of porous membrane filter from p-type silicon

AU - Grigoras, K.

AU - Franssila, S.

AU - Sikanen, T.

AU - Kotiaho, T.

AU - Kostiainen, R.

PY - 2005

Y1 - 2005

KW - fabrication of porous membrane filter

KW - p-type silicon

KW - fabrication of porous membrane filter

KW - p-type silicon

KW - fabrication of porous membrane filter

KW - p-type silicon

M3 - Article

VL - 202

SP - 1624

EP - 1628

JO - Physica Status Solidi

JF - Physica Status Solidi

ER -

ID: 3422732