Fabrication of porous membrane filter from p-type silicon

K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen

Research output: Working paperProfessional

21 Citations (Scopus)
Original languageEnglish
Place of PublicationVALENCIA, SPAIN
Pages326-327
Publication statusPublished - 2004
MoE publication typeD4 Published development or research report or study

Publication series

NamePorous Semiconductors - Science and Technology, Cullera-Valencia, Spain, 14-19 March 2004
PublisherTechnical University of Valencia, Spain

Keywords

  • electrochemical etching
  • filtration
  • fluorescent beads
  • macroporous silicon
  • separation

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