@techreport{5cd8eae810ee494ab25698ad709d6aa1,
title = "Fabrication of porous membrane filter from p-type silicon",
keywords = "electrochemical etching, filtration, fluorescent beads, macroporous silicon, separation, electrochemical etching, filtration, fluorescent beads, macroporous silicon, separation, electrochemical etching, filtration, fluorescent beads, macroporous silicon, separation",
author = "K. Grigoras and S. Franssila and T. Sikanen and T. Kotiaho and R. Kostiainen",
year = "2004",
language = "English",
series = "Porous Semiconductors - Science and Technology, Cullera-Valencia, Spain, 14-19 March 2004",
publisher = "Technical University of Valencia, Spain",
pages = "326--327",
type = "WorkingPaper",
institution = "Technical University of Valencia, Spain",
}