Fabrication of porous membrane filter from p-type silicon

K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)1624-1628
JournalPhysica Status Solidi
Volume202
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

Keywords

  • fabrication of porous membrane filter
  • p-type silicon

Cite this

Grigoras, K., Franssila, S., Sikanen, T., Kotiaho, T., & Kostiainen, R. (2005). Fabrication of porous membrane filter from p-type silicon. Physica Status Solidi, 202, 1624-1628.