Fabrication of porous membrane filter from p-type silicon

K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)1624-1628
JournalPhysica Status Solidi
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed


  • fabrication of porous membrane filter
  • p-type silicon

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