Original language | English |
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Title of host publication | Porous silicon science and technology 2004, Cullera-Valencia, Spain, 14-20.03.2004 |
Pages | 166-169 |
Publication status | Published - 2004 |
MoE publication type | A4 Article in a conference publication |
Fabrication of porous membrane filter from p-type silicon
K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review
20
Citations
(Scopus)