Fabrication of porous membrane filter from p-type silicon

K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

20 Citations (Scopus)

Original language	English
Title of host publication	Porous silicon science and technology 2004, Cullera-Valencia, Spain, 14-20.03.2004
Pages	166-169
Publication status	Published - 2004
MoE publication type	A4 Article in a conference publication

Cite this

@inproceedings{fac700c9806941a5a6617119634055db,

title = "Fabrication of porous membrane filter from p-type silicon",

author = "K. Grigoras and S. Franssila and T. Sikanen and T. Kotiaho and R. Kostiainen",

year = "2004",

language = "English",

pages = "166--169",

booktitle = "Porous silicon science and technology 2004, Cullera-Valencia, Spain, 14-20.03.2004",

}