Fabrication of porous membrane filter from p-type silicon

K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

21 Citations (Scopus)
Original languageEnglish
Title of host publicationPorous silicon science and technology 2004, Cullera-Valencia, Spain, 14-20.03.2004
Publication statusPublished - 2004
MoE publication typeA4 Article in a conference publication

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