Fabrication of photonic crystal waveguides on SOI

S. Yliniemi, Timo Aalto, P. Heimala, P. Pekko, K. Jefinovs, J. Simonen, T. Uusitupa

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationSPIE Photonics Fabrication Europe 2002, Brugge, Belgium, 28 Oct - 1 Nov, 2002
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication


    • photonic bandgap
    • waveguide

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