Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask

Jyrki M. Mäkelä; Helmi Keskinen; Mikko Aromaa; L. Sainiemi; Laura Luosujärvi; T. Kotiaho; S. Franssila

Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask

Jyrki M. Mäkelä, Helmi Keskinen, Mikko Aromaa, L. Sainiemi, Laura Luosujärvi, T. Kotiaho, S. Franssila

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	European Aerosol Conference 2007, Salzburg
Publication status	Published - 2007
MoE publication type	A4 Conference publication

Keywords

DRIE
etching
liquid flame spray
nanoparticles

Cite this

@inproceedings{e45932352dbc4aeaaca1c93d881b4208,

title = "Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask",

keywords = "DRIE, etching, liquid flame spray, nanoparticles, DRIE, etching, liquid flame spray, nanoparticles, DRIE, etching, liquid flame spray, nanoparticles",

author = "M{\"a}kel{\"a}, \{Jyrki M.\} and Helmi Keskinen and Mikko Aromaa and L. Sainiemi and Laura Luosuj{\"a}rvi and T. Kotiaho and S. Franssila",

year = "2007",

language = "English",

booktitle = "European Aerosol Conference 2007, Salzburg",

}

TY - GEN

T1 - Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask

AU - Mäkelä, Jyrki M.

AU - Keskinen, Helmi

AU - Aromaa, Mikko

AU - Sainiemi, L.

AU - Luosujärvi, Laura

AU - Kotiaho, T.

AU - Franssila, S.

PY - 2007

Y1 - 2007

KW - DRIE

KW - etching

KW - liquid flame spray

KW - nanoparticles

KW - DRIE

KW - etching

KW - liquid flame spray

KW - nanoparticles

KW - DRIE

KW - etching

KW - liquid flame spray

KW - nanoparticles

M3 - Conference article in proceedings

BT - European Aerosol Conference 2007, Salzburg

ER -