Fabrication of nanoclustered silicon surface with electric discharge

N. Suni, M. Haapala, E. Färm, M. Ritala, L. Sainiemi, Sami Franssila, T. Kotiaho, R. Kostiainen

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2009
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameTAS 2009, Jeju, South-Korea

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