Fabrication of Micromechanical Structures in Silicon for Optical Analysis in Microfluidics

P. Uotila, T. Siirtola, A. Hovinen, P. Kuivalainen, A. Lehto

Research output: Working paper › Professional

Original language	English
Publication status	Published - 1996
MoE publication type	D4 Published development or research report or study

Name	17th Nordic Semiconductor Meeting, Trondheim, Norway, 17-20.6.1996
Publisher	Norwegian Institute of Technology

Keywords

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title = "Fabrication of Micromechanical Structures in Silicon for Optical Analysis in Microfluidics",

keywords = "microfluidics, micromechanics, silicon, microfluidics, micromechanics, silicon, microfluidics, micromechanics, silicon",

author = "P. Uotila and T. Siirtola and A. Hovinen and P. Kuivalainen and A. Lehto",

year = "1996",

language = "English",

series = "17th Nordic Semiconductor Meeting, Trondheim, Norway, 17-20.6.1996",

publisher = "Norwegian Institute of Technology",

type = "WorkingPaper",

institution = "Norwegian Institute of Technology",

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TY - UNPB

T1 - Fabrication of Micromechanical Structures in Silicon for Optical Analysis in Microfluidics

AU - Uotila, P.

AU - Siirtola, T.

AU - Hovinen, A.

AU - Kuivalainen, P.

AU - Lehto, A.

PY - 1996

Y1 - 1996

KW - microfluidics

KW - micromechanics

KW - silicon

KW - microfluidics

KW - micromechanics

KW - silicon

KW - microfluidics

KW - micromechanics

KW - silicon

M3 - Working paper

T3 - 17th Nordic Semiconductor Meeting, Trondheim, Norway, 17-20.6.1996

BT - Fabrication of Micromechanical Structures in Silicon for Optical Analysis in Microfluidics

ER -