Fabrication of Micromechanical Structures in Silicon for Optical Analysis in Microfluidics

P. Uotila, T. Siirtola, A. Hovinen, P. Kuivalainen, A. Lehto

Research output: Working paperProfessional

Original languageEnglish
Publication statusPublished - 1996
MoE publication typeD4 Published development or research report or study

Publication series

Name17th Nordic Semiconductor Meeting, Trondheim, Norway, 17-20.6.1996
PublisherNorwegian Institute of Technology


  • microfluidics
  • micromechanics
  • silicon

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