Fabrication of GaN Structures with Embedded Network of Voids Using Pillar Patterned GaN Templates

Olli Svensk, Muhammad Ali, Lauri Riuttanen, Pekka Törmä, Sakari Sintonen, Sami Suihkonen, Markku Sopanen, Harri Lipsanen

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)42-45
Number of pages4
JournalJournal of Crystal Growth
Volume370
DOIs
Publication statusPublished - 1 May 2013
MoE publication typeA1 Journal article-refereed

Keywords

  • defects
  • etching
  • MOCVD
  • nitrides
  • selective epitaxy

Equipment

OtaNano

Anna Rissanen (Manager)

Aalto University

Facility/equipment: Facility

  • Cite this