Fabrication of freestending Al2o3 nanomembranes and bridges

L. Sainiemi, K. Grigoras, S. Franssila

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2008
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameMicroNanoEngineering 2008, Athens

    Cite this

    Sainiemi, L., Grigoras, K., & Franssila, S. (2008). Fabrication of freestending Al2o3 nanomembranes and bridges. (MicroNanoEngineering 2008, Athens).