Fabrication of a silicon based electroluminescent device

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Original languageEnglish
Pages (from-to)32-35
JournalMaterials Science & Engineering B
VolumeB74
Issue number1-3
Publication statusPublished - 2000
MoE publication typeA1 Journal article-refereed

    Research areas

  • nanostructures, RIE, self-organised mask, silicon

ID: 4148741