Fabrication of a silicon based electroluminescent device

A. Malinin; V. Ovchinnikov; S. Novikov; C. Tuovinen; A. Hovinen

Fabrication of a silicon based electroluminescent device

A. Malinin, V. Ovchinnikov, S. Novikov, C. Tuovinen, A. Hovinen

Department of Electrical Engineering and Automation

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	32-35
Journal	Materials Science & Engineering B
Volume	B74
Issue number	1-3
Publication status	Published - 2000
MoE publication type	A1 Journal article-refereed

Keywords

nanostructures
RIE
self-organised mask
silicon

Cite this

@article{96a2f5edc5e045ebbeeb5e2f2fec8f48,

title = "Fabrication of a silicon based electroluminescent device",

keywords = "nanostructures, RIE, self-organised mask, silicon, nanostructures, RIE, self-organised mask, silicon, nanostructures, RIE, self-organised mask, silicon",

author = "A. Malinin and V. Ovchinnikov and S. Novikov and C. Tuovinen and A. Hovinen",

year = "2000",

language = "English",

volume = "B74",

pages = "32--35",

journal = "Materials Science & Engineering B",

issn = "0921-5107",

publisher = "Elsevier",

number = "1-3",

}

TY - JOUR

T1 - Fabrication of a silicon based electroluminescent device

AU - Malinin, A.

AU - Ovchinnikov, V.

AU - Novikov, S.

AU - Tuovinen, C.

AU - Hovinen, A.

PY - 2000

Y1 - 2000

KW - nanostructures

KW - RIE

KW - self-organised mask

KW - silicon

KW - nanostructures

KW - RIE

KW - self-organised mask

KW - silicon

KW - nanostructures

KW - RIE

KW - self-organised mask

KW - silicon

M3 - Article

SN - 0921-5107

VL - B74

SP - 32

EP - 35

JO - Materials Science & Engineering B

JF - Materials Science & Engineering B

IS - 1-3

ER -