@techreport{fd523106089546a9b34815d9650792e6,
title = "Fabrication of a Passivating and Antireflecting Silicon Nitride Coating on Crystalline Silicon Solar Cells",
keywords = "antireflective coating, PECVD, silicon nitride, antireflective coating, PECVD, silicon nitride, antireflective coating, PECVD, silicon nitride",
author = "K. Nybergh and T. Marjam{\"a}ki and M. Laakso",
year = "1997",
language = "English",
series = "7th International Conference on Solar Energy at High Latitudes, Espoo Finland June 9-11, 1997",
publisher = "Helsinki University of Technology, Advanced Energy Systems and Technologies",
pages = "598--604",
type = "WorkingPaper",
institution = "Helsinki University of Technology, Advanced Energy Systems and Technologies",
}