Fabrication and characterization of an ultrasensitive acousto-optical cantilever for pressure sensing

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Fabrication and characterization of an ultrasensitive acousto-optical cantilever for pressure sensing. / Sievilä, Päivi; Rytkölä, Ville-Pekka; Hahtela, Ossi; Chekurov, Nikolai; Kauppinen, Jyrki; Tittonen, Ilkka.

In: Journal of Micromechanics and Microengineering, Vol. 17, No. 5, 2007, p. 852-859.

Research output: Contribution to journalArticleScientificpeer-review

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Sievilä, Päivi ; Rytkölä, Ville-Pekka ; Hahtela, Ossi ; Chekurov, Nikolai ; Kauppinen, Jyrki ; Tittonen, Ilkka. / Fabrication and characterization of an ultrasensitive acousto-optical cantilever for pressure sensing. In: Journal of Micromechanics and Microengineering. 2007 ; Vol. 17, No. 5. pp. 852-859.

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@article{1ad810e543594740ab40fb9b0f0ee6c4,
title = "Fabrication and characterization of an ultrasensitive acousto-optical cantilever for pressure sensing",
keywords = "acousto-optics, micromechanics, silicon cantilever, transducer, acousto-optics, micromechanics, silicon cantilever, transducer, acousto-optics, micromechanics, silicon cantilever, transducer",
author = "P{\"a}ivi Sievil{\"a} and Ville-Pekka Rytk{\"o}l{\"a} and Ossi Hahtela and Nikolai Chekurov and Jyrki Kauppinen and Ilkka Tittonen",
year = "2007",
language = "English",
volume = "17",
pages = "852--859",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "5",

}

RIS - Download

TY - JOUR

T1 - Fabrication and characterization of an ultrasensitive acousto-optical cantilever for pressure sensing

AU - Sievilä, Päivi

AU - Rytkölä, Ville-Pekka

AU - Hahtela, Ossi

AU - Chekurov, Nikolai

AU - Kauppinen, Jyrki

AU - Tittonen, Ilkka

PY - 2007

Y1 - 2007

KW - acousto-optics

KW - micromechanics

KW - silicon cantilever

KW - transducer

KW - acousto-optics

KW - micromechanics

KW - silicon cantilever

KW - transducer

KW - acousto-optics

KW - micromechanics

KW - silicon cantilever

KW - transducer

M3 - Article

VL - 17

SP - 852

EP - 859

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 5

ER -

ID: 3584188