Fabrication and characterization of an ultrasensitive acousto-optical cantilever for pressure sensing

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • Päivi Sievilä
  • Ville-Pekka Rytkölä
  • Ossi Hahtela
  • Nikolai Chekurov
  • Jyrki Kauppinen
  • Ilkka Tittonen

Research units

Details

Original languageEnglish
Pages (from-to)852-859
JournalJournal of Micromechanics and Microengineering
Volume17
Issue number5
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

    Research areas

  • acousto-optics, micromechanics, silicon cantilever, transducer

ID: 3584188