Fabrication and characterization of an ultrasensitive acousto-optical cantilever for pressure sensing

Päivi Sievilä, Ville-Pekka Rytkölä, Ossi Hahtela, Nikolai Chekurov, Jyrki Kauppinen, Ilkka Tittonen

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)852-859
    JournalJournal of Micromechanics and Microengineering
    Volume17
    Issue number5
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Keywords

    • acousto-optics
    • micromechanics
    • silicon cantilever
    • transducer

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