Extraction of the opto-geometrical properties of gratings from scattering data by means of the neural network

I. Kallioniemi, J. Saarinen, E. Oja

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationJoensuu
    Pages202-203
    Publication statusPublished - 1997
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameEuropean Optical Society Topical Meeting in Diffractive Optics, Savonlinna, Suomi, 7.7-9.7.1997
    PublisherEOS - European Optical Society

    Keywords

    • diffraction theory
    • diffractive optics
    • neural networks
    • scatterometry

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