Experimental validation of compact damping models of perforated MEMS devices

Timo Veijola, Giorgio De Pasquale, Aurelio Somà

    Research output: Contribution to journalArticleScientificpeer-review

    24 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1121-1128
    JournalMicrosystem Technologies
    Issue number8
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed


    • gas damping
    • MEMS
    • perforation
    • quality factor
    • resonator

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