Experimental study on re-dissolution of gettered iron impurities in Czochralski-grown silicon

P. Zhang, Hele Väinölä, A. Istratov, E.R. Weber

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)577-580
JournalSolid State Phenomena
Volume95-96
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed

Keywords

  • dissolution
  • internal gettering
  • iron
  • oxygen precipitates
  • silicon

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