Experimental Study of the Effects of Size Variations on Piezoelectrically Transduced MEMS Resonators

Antti Jaakkola, J. Lamy, James Dekker, Tuomas Pensala, L. Lipiäinen, K. Kokkonen

Research output: Working paper › Professional

6 Citations (Scopus)

Original language	English
Pages	410-414
DOIs	https://doi.org/10.1109/FREQ.2010.5556299
Publication status	Published - 2010
MoE publication type	D4 Published development or research report or study

Keywords

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title = "Experimental Study of the Effects of Size Variations on Piezoelectrically Transduced MEMS Resonators",

keywords = "Interferometry, MEMS, Interferometry, MEMS, Interferometry, MEMS",

author = "Antti Jaakkola and J. Lamy and James Dekker and Tuomas Pensala and L. Lipi{\"a}inen and K. Kokkonen",

year = "2010",

doi = "10.1109/FREQ.2010.5556299",

language = "English",

pages = "410--414",

type = "WorkingPaper",

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TY - UNPB

T1 - Experimental Study of the Effects of Size Variations on Piezoelectrically Transduced MEMS Resonators

AU - Jaakkola, Antti

AU - Lamy, J.

AU - Dekker, James

AU - Pensala, Tuomas

AU - Lipiäinen, L.

AU - Kokkonen, K.

PY - 2010

Y1 - 2010

KW - Interferometry

KW - MEMS

KW - Interferometry

KW - MEMS

KW - Interferometry

KW - MEMS

U2 - 10.1109/FREQ.2010.5556299

DO - 10.1109/FREQ.2010.5556299

M3 - Working paper

SP - 410

EP - 414

BT - Experimental Study of the Effects of Size Variations on Piezoelectrically Transduced MEMS Resonators

ER -