Experimental study of internal gettering effciency of iron in silicon

Antti Haarahiltunen, Marko Yli-Koski, Hele Väinölä, Martti Palokangas, Eero Saarnilehto, Juha Sinkkonen

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)91-93
JournalPHYSICA SCRIPTA: TOPICAL ISSUES
VolumeT114
Issue number2
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed

Keywords

  • internal gettering
  • iron
  • silicon

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