Experimental and theoretical study of heterogeneous iron precipitation in silicon

Antti Haarahiltunen, Hele Väinölä, O. Anttila, Marko Yli-Koski

    Research output: Contribution to journalArticleScientificpeer-review

    51 Citations (Scopus)
    Original languageEnglish
    JournalJournal of Applied Physics
    Volume101
    Issue number4
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Keywords

    • gettering
    • iron
    • oxide precipitates
    • precipitation
    • silicon

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