Existing and emerging possibilities for Industrial Atomic Layer Deposition

Vsedolov Tuzovskiy, Matti Putkonen, Sami Sneck

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationRusnanotech 2009,Moscow, Russia, 6-8.10.2009
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication

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