| Original language | English |
|---|---|
| Title of host publication | Rusnanotech 2009,Moscow, Russia, 6-8.10.2009 |
| Publication status | Published - 2009 |
| MoE publication type | A4 Article in a conference publication |
Existing and emerging possibilities for Industrial Atomic Layer Deposition
Vsedolov Tuzovskiy, Matti Putkonen, Sami Sneck
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review