Excimer-Laser Beam Shaping Using Periodic Diffractive Elements

Antti Hakola, Timo Kajava, Henna Elfström, Janne Simonen, Pertti Pääkkönen, Jari Turunen

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationJyväskylä
Publication statusPublished - 2005
MoE publication typeD4 Published development or research report or study

Publication series

NameOptics Days - Optiikan päivät 2005, Jyväskylä, 12.-13.5.2005
PublisherDepartment of Physics and Department of Chemistry, University of Jyväskylä

Keywords

  • diffractive beam shaping
  • excimer laser
  • flat top
  • periodic element

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