Excimer laser beam shaping using diffractive optics

T. Kajava, M. Kaivola, J. Turunen, Pertti Pääkkönen, M. Kuittinen, P. Laakkonen, J. Simonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics CLEO/Europe´2000, Nice, France, 10-15 September, 2000
Place of PublicationPiscataway, N.J., USA
PagesCThO7
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication

Keywords

  • beam shaping
  • diffractive optics
  • excimer lasers
  • flat top generation
  • partial coherence

Cite this