@techreport{fac163d028054e6fae71fdc6f3b64192,
title = "Excimer laser beam analysis and shaping for pulsed laser deposition",
keywords = "beam profiling, beam shaping, flat-top distribution, laser ablation, pulsed laser deposition, beam profiling, beam shaping, flat-top distribution, laser ablation, pulsed laser deposition, beam profiling, beam shaping, flat-top distribution, laser ablation, pulsed laser deposition",
author = "I. Jantunen and M. Tuohiniemi and T. Kajava",
year = "1999",
language = "English",
series = "5th International Conference on Laser Ablation COLA '99, G{\"o}ttingen, Germany, July 19-23, 1999",
publisher = "Max-Planck-Institut G{\"o}ttingen",
pages = "206",
type = "WorkingPaper",
institution = "Max-Planck-Institut G{\"o}ttingen",
}