Excimer laser beam analysis and shaping for pulsed laser deposition

I. Jantunen, M. Tuohiniemi, T. Kajava

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationGöttingen
Publication statusPublished - 1999
MoE publication typeD4 Published development or research report or study

Publication series

Name5th International Conference on Laser Ablation COLA '99, Göttingen, Germany, July 19-23, 1999
PublisherMax-Planck-Institut Göttingen


  • beam profiling
  • beam shaping
  • flat-top distribution
  • laser ablation
  • pulsed laser deposition

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