Original language | English |
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Article number | 355701 |
Pages (from-to) | 1-8 |
Number of pages | 8 |
Journal | Nanotechnology |
Volume | 25 |
Issue number | 35 |
DOIs | |
Publication status | Published - 2014 |
MoE publication type | A1 Journal article-refereed |
Keywords
- aluminum oxide
- atomic layer deposition
- bulge test
- CVD graphene
- mechanical strength
- suspended membrane
Equipment
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Raw Materials Research Infrastructure
Maarit Karppinen (Manager)
School of Chemical EngineeringFacility/equipment: Facility