Excellent Responsivity and Low Dark Current Obtained with Metal-Assisted Chemical Etched Si Photodiode

Kexun Chen, Olli Setälä, Xiaolong Liu, Behrad Radfar, Toni Pasanen, Michael Serue, Juha Heinonen, Hele Savin, Ville Vähänissi

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
25 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Excellent Responsivity and Low Dark Current Obtained with Metal-Assisted Chemical Etched Si Photodiode'. Together they form a unique fingerprint.

Engineering

Material Science

Chemistry

Physics