Exact controls for superconformal via fill process

Robert Tenno, Antti Pohjoranta

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationUKACC International Conference on Control 2008, University of Manchester, UK, Sept. 2-4, 2008
    Place of PublicationManchester, UK
    Pages6
    ISBN (Electronic)978-0-9556152-1-4
    Publication statusPublished - 2008
    MoE publication typeA4 Article in a conference publication

    Keywords

    • distributed parameters systems control
    • via fill control

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