Evaluation of Effective Carrier Lifetime in Epitaxial Silicon Layers

Hele Väinölä, Jan Storgårds, Marko Yli-Koski, Juha Sinkkonen

Research output: Working paperProfessional

3 Citations (Scopus)
Original languageEnglish
Pages771-776
Publication statusPublished - 2001
MoE publication typeD4 Published development or research report or study

Publication series

NameGADEST 2001, 9th International Autumn Meeting: gettering and defect engineering in semiconductor technology
PublisherScitec Publications Ltd

Keywords

  • built-in potential
  • carrier lifetime
  • continuity equation
  • epitaxial layers
  • photoconductive decay

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