Evaluation of carbon-doped low-k multilayer structure by nanoindentation

M. Fujikane, S. Nagao, X.W. Liu, D. Chrobak, A. Lehto, S. Yamanaka, R. Nowak

    Research output: Contribution to journalArticleScientificpeer-review

    7 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)293-297
    Number of pages5
    JournalJournal of Alloys and Compounds
    Volume448
    Issue number1-2
    DOIs
    Publication statusPublished - 2008
    MoE publication typeA1 Journal article-refereed

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