Evaluation of carbon-doped low-k multilayer structure by nanoindentation

M. Fujikane; S. Nagao; X.W. Liu; D. Chrobak; Ari Lehto; S. Yamanaka; R. Nowak

doi:10.1016/j.jallcom.2006.10.089

Evaluation of carbon-doped low-k multilayer structure by nanoindentation

M. Fujikane, S. Nagao, X.W. Liu, D. Chrobak, Ari Lehto, S. Yamanaka, R. Nowak

Osaka University

Research output: Contribution to journal › Article › Scientific › peer-review

10 Citations (Scopus)

Original language	English
Pages (from-to)	293-297
Number of pages	5
Journal	Journal of Alloys and Compounds
Volume	448
Issue number	1-2
DOIs	https://doi.org/10.1016/j.jallcom.2006.10.089
Publication status	Published - 2008
MoE publication type	A1 Journal article-refereed

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10.1016/j.jallcom.2006.10.089

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title = "Evaluation of carbon-doped low-k multilayer structure by nanoindentation",

author = "M. Fujikane and S. Nagao and X.W. Liu and D. Chrobak and Ari Lehto and S. Yamanaka and R. Nowak",

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doi = "10.1016/j.jallcom.2006.10.089",

language = "English",

volume = "448",

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journal = "Journal of Alloys and Compounds",

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TY - JOUR

T1 - Evaluation of carbon-doped low-k multilayer structure by nanoindentation

AU - Fujikane, M.

AU - Nagao, S.

AU - Liu, X.W.

AU - Chrobak, D.

AU - Lehto, Ari

AU - Yamanaka, S.

AU - Nowak, R.

PY - 2008

Y1 - 2008

UR - http://dx.doi.org/10.1016/j.jallcom.2006.10.089

U2 - 10.1016/j.jallcom.2006.10.089

DO - 10.1016/j.jallcom.2006.10.089

M3 - Article

SN - 0925-8388

VL - 448

SP - 293

EP - 297

JO - Journal of Alloys and Compounds

JF - Journal of Alloys and Compounds

IS - 1-2

ER -

Evaluation of carbon-doped low-k multilayer structure by nanoindentation

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