Etching undr the corner, inclined macropores by ICP-RIE

Kestutis Grigoras, Sami Franssila

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2008
    MoE publication typeD4 Published development or research report or study

    Publication series

    NamePorous Semiconductors Science and Technology Conference, Mallorca, March 10-14

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