Etching Techniques for Superhydrophobic Surface Fabrication

Sami Franssila*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Abstract

Roughness required for superhydrophobic surfaces (SHB) can be produced by various means: etching, sand blasting, particle deposition, nanostructure growth, phase separation, moulding, imprinting, or even simply by scratching. Etching techniques have been developed for microtechnologies over 50 years, and they are available for many materials in many implementations. This chapter emphasizes the etching of silicon, which is a widely used model surface in superhydrophobicity studies. Silica, metal, and polymer etching are also briefly described.

Original languageEnglish
Title of host publicationNon-wettable Surfaces: Theory, Preparation, and Applications
PublisherRoyal Society of Chemistry
Pages117-144
Number of pages28
Volume2017-January
Edition5
ISBN (Electronic)978-1-78262-395-3, 978-1-78262-968-9
ISBN (Print)978-1-78262-154-6
DOIs
Publication statusPublished - 2017
MoE publication typeA3 Part of a book or another research book

Publication series

NameRSC Soft Matter
Number5
Volume2017-January

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