Equivalent-circuit model of the squeezed gas film in a silicon accelerometer

T. Veijola, H. Kuisma, J. Lahdenperä, T. Ryhänen

    Research output: Contribution to journalArticleScientificpeer-review

    451 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)239-248
    JournalSensors and Actuators A
    Issue number3
    Publication statusPublished - 1995
    MoE publication typeA1 Journal article-refereed


    • squeezed gas films, slip flow, effective gas viscosity

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