Enhanced responsivity of co-hyperdoped silicon photodetectors fabricated by femtosecond laser irradiation in mixed SF₆/NF₃ atmosphere

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13 Citations (Web of Science)

Original language	English
Journal	Journal of the Optical Society of America B: Optical Physics
DOIs	https://doi.org/10.1364/josab.374044
Publication status	Published - 9 Jan 2020
MoE publication type	A1 Journal article-refereed

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title = "Enhanced responsivity of co-hyperdoped silicon photodetectors fabricated by femtosecond laser irradiation in mixed SF₆/NF₃ atmosphere",

author = "Shengxiang Ma and Xiaolong Liu and Haibin Sun and Yang Zhao and Yue Hu and Xijing Ning and Li Zhao and Jun Zhuang",

year = "2020",

month = jan,

day = "9",

doi = "10.1364/josab.374044",

language = "English",

journal = "Journal of the Optical Society of America B: Optical Physics",

issn = "0740-3224",

publisher = "Optica Publishing Group",

}

TY - JOUR

T1 - Enhanced responsivity of co-hyperdoped silicon photodetectors fabricated by femtosecond laser irradiation in mixed SF₆/NF₃ atmosphere

AU - Ma, Shengxiang

AU - Liu, Xiaolong

AU - Sun, Haibin

AU - Zhao, Yang

AU - Hu, Yue

AU - Ning, Xijing

AU - Zhao, Li

AU - Zhuang, Jun

PY - 2020/1/9

Y1 - 2020/1/9

UR - http://dx.doi.org/10.1364/josab.374044

U2 - 10.1364/josab.374044

DO - 10.1364/josab.374044

M3 - Article

SN - 0740-3224

JO - Journal of the Optical Society of America B: Optical Physics

JF - Journal of the Optical Society of America B: Optical Physics

ER -