Enhanced growth rate in atomic layer epitaxy deposition of magnesium oxide thin films

M. Putkonen, T. Sajavaara, L. Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    68 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1857-1861
    JournalJournal of Materials Chemistry
    Volume10
    Issue number8
    Publication statusPublished - 2000
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer epitaxy
    • organometallic

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