Energy Dissipation Associated with Material Damping on Vibrating MEMS Components

Giorgio De Pasquale, Timo Veijola, Aurelio Somà

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    2 Citations (Scopus)
    Original languageEnglish
    Title of host publicationDesign, Test, Integration and Packaging of MESMS/MOEMS, Seville, Spain, May 5-7, 2010
    Place of PublicationSeville, Spain
    Pages99-104
    ISBN (Electronic)978-2-35500-011-9
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication

    Keywords

    • damping
    • material dampinmg
    • MEMS

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