End Effects of Rare Gas Flow in Short Channels and in Squeezed-Film Dampers

T. Veijola

    Research output: Working paperProfessional

    21 Citations (Scopus)
    Original languageEnglish
    Place of PublicationUSA
    Pages104-107
    Publication statusPublished - 2002
    MoE publication typeD4 Published development or research report or study

    Publication series

    Name2002 International Conference on Modeling and Simulation of Microsystems. San Juan, Puerto Rico 21-25.4.2002

    Keywords

    • compact model
    • end effect
    • Knudsen number
    • rarefied gas flow
    • squeeze-film damper

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