Electron probe microanalysis of Ni-silicides at low voltage: difficulties and possibilities

E. Heikinheimo, P. T. Pinard, S. Richter, X. Llovet, S. Louhenkilpi

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2 Citations (Scopus)
294 Downloads (Pure)

Abstract

Interest in the use of EPMA at low voltage has grown considerably in recent years, mainly because of the availability of electron-beam instruments equipped with field-emission guns. However, EPMA at low voltage is marred by both experimental and analytical problems which may affect the accuracy of quantitative results. In the case of the analysis of transition elements, both the emission and absorption of X-rays are still poorly understood when they originate from electron transitions involving the partially filled 3d-shell. This is the case for the most intense Lα (L3-M5 transition) and Lβ (L2-M4 transition) lines. In this communication, we point out anomalies which appear to afflict the accuracy of EPMA of Ni-silicides using the Ni-Lα X-ray line and we discuss possible solutions.

Original languageEnglish
Title of host publication14th European Workshop on Modern Developments and Applications in Microbeam Analysis (EMAS 2015 Workshop)
Volume109
DOIs
Publication statusPublished - 2016
MoE publication typeA4 Article in a conference publication
EventEuropean Workshop on Modern Developments and Applications in Microbeam Analysis - Portoroz, Slovenia
Duration: 3 May 20157 May 2015
Conference number: 14

Publication series

NameIOP Conference Series: Materials Science and Engineering
ISSN (Print)1757-8981

Workshop

WorkshopEuropean Workshop on Modern Developments and Applications in Microbeam Analysis
CountrySlovenia
CityPortoroz
Period03/05/201507/05/2015

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