Electromechanical analysis of micromechanical SOI-fabricated RF resonators

T. Lamminmäki, K. Ruokonen, I. Tittonen, T. Mattila, O. Jaakkola, A. Oja, H. Seppä, P. Seppälä, J. Kiihamäki

Research output: Working paperProfessional

4 Citations (Scopus)
Original languageEnglish
Pages217-220
Publication statusPublished - 2000
MoE publication typeD4 Published development or research report or study

Publication series

NameThird International Conference on Modeling and Simultation of Microsystems, San Diego, USA, March 27-29, 2000

Keywords

  • FEM
  • non-linearity
  • resonator
  • RF-MEMS

Cite this

Lamminmäki, T., Ruokonen, K., Tittonen, I., Mattila, T., Jaakkola, O., Oja, A., Seppä, H., Seppälä, P., & Kiihamäki, J. (2000). Electromechanical analysis of micromechanical SOI-fabricated RF resonators. (pp. 217-220). (Third International Conference on Modeling and Simultation of Microsystems, San Diego, USA, March 27-29, 2000).