Electromechanical analysis of micromechanical SOI-fabricated RF resonators

T. Lamminmäki, K. Ruokonen, I. Tittonen, T. Mattila, O. Jaakkola, A. Oja, H. Seppä, P. Seppälä, J. Kiihamäki

Research output: Working paperProfessional

4 Citations (Scopus)
Original languageEnglish
Pages217-220
Publication statusPublished - 2000
MoE publication typeD4 Published development or research report or study

Publication series

NameThird International Conference on Modeling and Simultation of Microsystems, San Diego, USA, March 27-29, 2000

Keywords

  • FEM
  • non-linearity
  • resonator
  • RF-MEMS

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